Neutron Activation Analysis(NAA)
Neutron Activation Analysis
Identify and measure trace contaminants in bulk materials
Inorganic materials such as polysilicon. Organic polymers tissues and biological materials.
ppt to ppb
High Resolution Inductively Coupled Plasma Mass Spectroscopy (HR-ICPMS)
High Resolution Inductively Coupled Plasma Mass Spectrometer
Identify and measure trace metals in aqueous samples
VPD samples, ultra pure water, process chemicals, material extracts, chemical waste streams
ppt to ppb
Vapor Phase Decomposition (VPD)
Vapor Phase Decomposition
Collection process used to identify and measure trace metals on wafer surfaces.
Silicon wafers, hydrofluoric acid soluble thin films
E6 to E14 atoms/cm2
GeMeTec WSPS with PAD-Fume and PAD-Scan
Gemetec Wafer Surface Preparation System with Programmable Automated Decomposition Fumer and Programmable Automated Droplet Scanner
Automated VPD prep tool. Wafers are handled by robot in ULPA filtered class 10 environment and transferred from cassette stand to fuming module to scanning module.
Silicon wafers, hydrofluoric acid soluble thin films
E6 to E14 atoms/cm2
Inductively Coupled Plasma Optical Emission Spectroscopy (ICPOES)
Inductively Coupled Plasma Optical Emission Spectrometer
identify and measure trace metals in aqueous samples
water, chemicals, material extracts, slurries, chemical waste streams
ppb to ppm
Wavelength Dispersive X-Ray Fluorescence Spectroscopy (WDXRF)
Wavelength Dispersive X-Ray Fluorescence Spectrometer
qualitative and quantitative elemental analysis of solid materials
Identify unknowns, elemental bulk analysis, thin films composition, contaminant studies
ppm to wt%
Fourier Transform Infrared Spectroscopy (FTIR)
Micro Fourier Transform Infrared Spectrometer
identification of organic and inorganic compounds
Identify molecular composition of organic materials and polymers, characterize thin films, analyze non-reactive gases
wt%
Thermal Desorb Gas Chromatograph Mass Spectroscopy (ATD-GC-MS)
Thermal Desorb Gas Chromatograph Mass Spectrometer
qualitative and quantitative analysis of organic compounds and mixtures
solvents, air samples, process chemicals, water, polymers, wafers
ppb to wt%
Ion Chromatography (IC)
Ion Chromatography
Aqueous ionics measurements
anions and cations in UPW, diluted chemicals, material extracts
ppb to ppm
Total Organic Carbon (TOC)
Total Organic Carbon Analyzer
inorganic and organic carbon determinations in aqueous samples
water, water extracts
0.1 to 10ppm
Auto-Titrator
Potentiometry based autotitration systems
Secondary Ion Mass Spectroscopy(SIMS)
Mass analysis surface and depth profiling
Dopant or compositional element depth analysis
Secondary Ions
Down to 1e12 at/cm3
Quadrupole Secondary Ion Mass Spectroscopy(Quad SIMS)
Thin Film and Shallow Implant Depth Profile
Dopant or compositional element depth profile
Secondary Ions
Down to 1E16 at/cm3
Auger Electron Spectroscopy(AES)
Elemental surface analysis
Depth profiling with Ar sputter, surface contamination, cross-section analysis
Auger electrons
0.1-1 at%
Electron Spectroscopy for Chemical Analysis
(aka ESCA or XPS)
Elemental Surface analysis
Depth profiling with Ar sputter, chemical state information, thin film composition analysis
Photoelectrons
0.1 at%
X-Ray Diffraction
(XRD)
Crystal Orientation Analysis
Grain size, orientation, and texture analysis
Crytal plane d-spacing
+/-.5%
X-Ray Reflection
(XRR)
Reflectivity Analysis
Density, Interfacial Roughness, and Thickness of thin films
Reflected X-rays
+/- 3% of signals detected
Atomic Force Microscopy
(AFM)
Surface topography
Roughness of thin films, and step height information
Atomic morphology
< 2 Å
Rutherford Backscattering spectrometry (RBS)
Elemental surface analysis
Thin film stoichiometry and composition and impurity analysis of films and materials
Backscattered ions
1 E 14/ cm2
Dependent on mass of target atom.
Ion Channeling
Elemental analysis and depth profiling for single crystals
Lattice location of defects and impurities in single crystal materials
Backscattered ions
1 E 14/cm2
Dependent on mass of target atom.
Micro-Raman Spectroscopy(µ-RS)
Molecular composition
Defect analysis, thin film monitoring
Bond vibration frequencies
Sample dependent
Total Reflection X-Ray Fluorescence Spectroscopy(TXRF)
Elemental composition
Trace contamination on wafer surfaces
Secondary x-ray fluorescence
1 E 9/cm2